Semiconductor Systems

Semiconductor Systems

In this division PVA TePla is offering high tech systems for the semiconductor industry ranging from systems for the production of silicon crystals for the semiconductor and opto-eleletronic industry to systems for plasma treatment in the semiconductor assembly.

 

The company also supplies innovative systems for non-destructive, ultrasonic quality inspection for high tech materials.

 


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Crystal Growing Systems

 

Crystal Growing Systems Crystal Growing
(Czochralski process, Vertical Gradient Freeze, SIGE Epitaxie CVD, Floatzone)
 

For years PVA TePla Group has been designing and producing crystal growing equipment for the production of silicon crystals, and as a technologically leading producer PVA TePla is one of the most important in its field  ... more
   

 


Plasma Systems

 

Plasma Systems

Microwave-Plasma and RF-Plasma

(Waferthinning, Photoresist Ashing, Chip Packaging, Flat Panel Displays, Ion Beam Etching, RF-Plasma)

 

Originating from the former TePla AG Munich, the division Plasma Systems designs, develops and builds customer specific plasma equipment. The division specializes in technologies used for the surface modification of substrates through the controlled application of plasma. ... more

   

 



Measurement

 

Measurement

Ultrasonic Measurement and Wafer Metrology
(SIRD, TWIN)
 

 

The unique characteristic of Scanning Acoustic Microscopy is its ability to non-destructively examine the interior of opaque materials with the resolution of optical light microscopy. New ways of thinking and visionary ideas are behind our successful concepts of trend-setting scanning acoustic microscopy technologies. .. more

   



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