Semiconductor Systems
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In this business unit PVA TePla is offering high tech systems for the semiconductor industry ranging from systems for the production of silicon crystals for the semiconductor and opto-eleletronic industry to systems for plasma treatment in the semiconductor assembly.
The company also supplies innovative systems for non-destructive, ultrasonic quality inspection for high tech materials.
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Crystal Growing Systems
 | Crystal Growing (Czochralski process, Vertical Gradient Freeze, SIGE Epitaxie CVD, Floatzone) For decades CGS has been designing and producing crystal growing equipment for the production of silicon crystals, and as a technologically leading producer CGS is one of the most important in its field ...  more |
Plasma Systems
 | Microwave-Plasma and RF-Plasma (Waferthinning, Photoresist Ashing, Chip Packaging, Flat Panel Displays, Ion Beam Etching, RF-Plasma)
Originating from the former TePla AG Munich, the division Plasma Systems designs, develops and builds customer specific plasma equipment. The division specializes in technologies used for the surface modification of substrates through the controlled application of plasma. ... |
Measurement
 | Ultrasonic Measurement and Wafer Metrology
For the quality check of materials PVA TePla offers a variety of optical and ultra-sonic inspection systems .. |
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Quarterly Report II - 09/06/10
25th EUPVSECTrade Show in Valencia,Spain
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