Semiconductors
The highly innovative chip industry requires new materials and technologies for:
- higher processing power
- faster connections
- higher memory capacity
PVA TePla offers a wide range of highly innovative key technologies for the semiconductor market, especially in the segments crystal growing, surface engineering and analytical systems.
Vacuum Systems
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 | COV Heat Treatment Systems with Graphite Resistance Heater
COV heat treatment systems are high
performance most efficient furnaces with a wide working-temperature and
application range. Due to the compatibility with all kind of process
gases and the fully automatic process ...  more |
Crystal Growing Systems
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Typ EKZ 3500
The EKZ 3500/200 is
used to produce crystals up to 200mm in diameter. The typical batch
weights range between 120 and 150kg, depending on the hot zone installed
and the use of feeder for increasing the batch weight. The crystal
lengths obtainable from such batch sizes measure about 1.5m in the
cylindrical portion.... more |
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Typ EKZ 3000
Compared to the crystal pulling equipment used
until now, the concept and design of the 300mm plant signify a quantum leap. In
developing the plant, consideration was given to all knowledge gained to date
and to the available know-how of our customers worldwide. These furnaces provide
ideal conditions for meeting crystal quality requirements. ... more |
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Typ FZ 14
This machine is an intelligently designed piece of equipment, which in
addition to meet the requirements in silicon crystal growing at
diameters up to 4 inch and at the same time with reasonable physical
dimensions. The machine have a crystal growing length of 1300 mm and
produces 3" crystals up to ... more |
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Typ FZ 14 M
For analytical purposes, the FZ-14M has been developed. This a is a
floatzone Silicon crystal grower specifically designed in accordance
with the requirements of ASTM Std. F1723-96. The FZ-14M converts
minature rods of polycrystalline silicon into monocrystalline silicon
for use in the assessment of the ... more |
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Typ FZ 30
The FZ-30 consists of a main, upper and lower chamber and an upper and
lower pulling arrangement, all built as modules. The FZ-30 is fully
equipped with access doors, a tank circuit, a control panel, a high
frequency generator, a data logging system and an operator’s platform
... more |
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Typ Delta
Die Niederdruck-/Niedertemperatur-Anlage ist für Chemical Vapor
Deposition (CVD) von SiGe oder SiGe:C auf Silizium-Wafern von 200 und
300mm Durchmesser konzipiert. Das modular aufgebaute System mit
vertikal angeordnetem Reaktor ist für den Kassette-zu-Kassette-Betrieb
vorgesehen... more |
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Typ SR 110
This machine is very effective since two slim rods are produced at the
same time, using a double hole HF-coil connected to one generator.
Every care has been taken to make the machine very operator friendly
and to allow fast restart of pulling after harvest of the produced
slimrods ... more
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Plasma Systems
Waferthinning
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PS 80 Plus Asyntis
Chip Side Healing
Back-Side Stress Relief (AES Process, active side faces dicing tape)
Contact free exposing 3D-TSV (AES Process, active side faces dicing tape)
Wafer and Die Thinning (AES Process, ... more |
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PS 4008 Asyntis / OEM
The PS 4008 ASYNTIS/OEM is a remote cold plasma system based on
microwave plasma generation. The manual machine is ideally suited for
many different applications such as stress relief, special surface
treatments and wafer thinning. In this plasma system ... more |
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Asyntis 2.2
Fully Automated Remote Plasma System . more |
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Photoresist Ashing
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GIGAbatch 310 M Serie
Compact, price attractive bench top system for semiconductor applications, configured for universities and R&D labs. Suitable for various substrate sizes ranging from 2" to 6" wafers... more |
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GIGAfab M
Most compact version of the GIGAfab model family, targeting SU-8 Removal, MEMS Fabrication, Wafer Bumping and Flat Panel Display Technology ... more |
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GIGAfab A200/300
Automatic Single Wafer Asher for 200 or 300 mm Wafers, serving Semiconductor Device Fabrication, Wafer Bumping and MEMS Manufacturing. ... more |
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PS 210
The Microwave Plasma System 210 is our most popular full featured
plasma surface modification system designed for laboratory and
production use. The Microwave Plasma System 210 is ideal for... more |
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Chip Packaging
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PS 400/660
The Microwave Plasma Systems 400/660 Inline are the most versatile plasma cleaners in the world of chip packaging ... more |
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PS 400/660 IL
The Microwave Plasma Systems 400/660 Inline are the most versatile plasma cleaners in the world of chip packaging... more |
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PS 400 H2
The Microwave Plasma Systems 400/660 Inline are the most versatile plasma cleaners in the world of chip packaging... more |
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GIGA 80 Plus
GIGA 80 Plus is the only fully automatic Microwave Plasma System worldwide focused on the cleaning of individual substrates in semiconductor packaging. GIGA 80 Plus is applicable as INLINE SOLUTION or as STAND ALONE TOOL ... more |
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Flat Panel Display
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PS 4011
The plasma system 4011 is designed for process development of flat
panel displays. The chamber is loaded manually. The glass plates are
easily placed... more |
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Wafermetrologie
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SIRD
The introduction of the 300mm wafers has required further fab
refinements, bringing also new standards for the suppliers of such of
bare wafers: Increasing from 200 mm to 300mm diameter, the wafer has
more than doubled it's surface ... more |
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TWIN
The Implant process is a very critical step within the integrated
circuits manufacturing line. It defines important characteristics and
properties of the devices-to-be by doping certain layers of the silicon
substrate. Rework processes ... more |
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Ion Beam Etching
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RIBETCH 160 ECR
This reactive ion beam etching system is used for microstructuring of
microelectronic or electro-optical devices and is suitable for etching
processes with argon ions (IBE) as well as for chemically reactive
etching processes (RIBE, CAIBE). These systems ... more |
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Ultrasonic Measurement
PVA TePla also offers
Ultrasonic Measurement for the nondestructive Inspection of High tech materials. Find more to this on the Homepage of our subsidiary PVA TePla Analytical Systems
http://www.samtec-germany.com/
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