Planar Plasma System GIGAfab Gen Series for FPD

The GIGAfab Gen series is dedicated to serve the Flat Panel Display market and is scalable to larger panel generations.

The modular plasma tools can be configured for manual operation or integration in automatic production lines with robot handling.

Typical applications:

Wettability adjustment and surface preparation or ultrafine cleaning prior to Ink Jet Printing and encapsulation for PLED-manufacturing lines.

Model GIGAfab Gen 2

Panel size of model GIGAfab Gen 2 :	370 x 470 mm or 400 x 400 mm Temperature-controlled substrate plate
Plasma Generation:	Planar microwave plasma source geometry Microwave power: 4000 Watt max.
System Dimension:	W x H x D = 1,750 x 2,000 x 950 mm (69" x 79" x 38")
Related Applications:	Plasma treatment for Ink Jet Printing Flat Panel Photoresist Ashing Descum and Substrate Cleaning