Typ FZ-14

Applications

The FZ-14 floatzone silicon crystal grower is a fully optimized machine for industrial and scientific scale production of silicon monocrystals.

Description


This machine is an intelligently designed piece of equipment, which meets the requirements in silicon crystal growing at diameters of up to 4 inches and at the same time has reasonable physical dimensions. The machine has a crystal growing length of 1300 mm and produces 3" crystals up to 1300 mm and 4" crystals up to 450 mm long.

References

These machines are in operation at a large number of silicon factories around the world, and customer feedback ensures a continuous product improvement and development.

 

TYP FZ 14 
Features:

No oil (hydrocarbons) at any component
Ultra low (no) natural pollution
Ultimate component quality
Low weight (aluminum frame)
High vacuum turbo pump systems
Electro-pneumatically operated
Remote controlled door clamping system

 

Main Components:

The complete FZ-14M crystal grower consists of the following components:

  • Floatzone refiner
  • High frequency generator
  • High vacuum turbo pump system
  • Control panel
  • Electro-pneumatically operated pre-heating system

 

 

References:
The FZ-14M has been supplied to some of the world’s largest polysilicon manufacturers.




 

 

Business unit

Geschäftsbereich Semiconductor Systems



 

trenner

 

Your service contact

 

PVA TePla AG
Im Westpark

 PVA TePla AG

Im Westpark 10 - 12
35435 Wettenberg

+49 (0) 641/68690-0
E-Mail: info@pvatepla.com

 

trenner

 

 

Downloads / Information Material

 

You can receive information material at our Download-Service , or make an inquiry using our Contact Form.

 


nach oben Go to top