The  Polysilicon Test Grower - FZ-14M


Description

For analytical purposes, the FZ-14M has been developed. This is a floatzone Silicon crystal grower specifically designed in accordance with the requirements of ASTM Std. F1723-96. The FZ-14M converts miniature rods of polycrystalline silicon into monocrystalline silicon for use in the assessment of the quality and purity of polycrystalline material. The F1723-96 prescribes that samples from the core of the polysilicone are converted into monocrystalline silicon in the floatzone grower. The rod is converted in a single pass in a gas ambient atmosphere (argon). The single crystal is analysed by spectrophotometric methods to determine the trace impurities in the polysilicon. The trace impurities are acceptor (boron and/or aluminum), donor (phosphorus and/or arsenic), and carbon.  


References

The FZ-14M has been supplied to some of the world’s largest polysilicon manufacturers.

 

 

Typ FZ 14M 
Features:
  • No oil (hydrocarbons) at any component
  • Ultra low (no) natural pollution
  • Ultimate component quality
  • Low weight (aluminum frame)
  • High vacuum turbo pump systems
  • Electro-pneumatically operated
  • Remote controlled door clamping system

Main Components
The complete FZ-14M crystal grower consists of the following components:
  • Floatzone refiner
  • High frequency generator
  • High vacuum turbo pump system
  • Control panel
  • Electro-pneumatically operated pre-heating system
 

 


 


Applications
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Business unit

gb Semiconductor Systems



 

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Your service contact

 

PVA TePla AG
Im Westpark 10

 PVA TePla AG

Im Westpark 10 - 12
35435 Wettenberg

+49 (0) 641/68690-0
E-Mail: info@pvatepla.com

 

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Downloads / Information Material

 

You can receive information material at our Download-Service , or make an inquiry using our Contact Form.

 


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