The Floatzone Silicon Grower - FZ-20

Applications

FZ-20 grows monocrystalline silicon ingots with diameters of up to 6 inches and with lengths of up to 1,500 mm.

Description

The FZ-20 consists of a main, upper and a lower chamber, an upper and a lower pulling arrangement, all built as modules. The FZ-20 is fully equipped with access doors, a tank circuit, a control panel, a high frequency generator, a data logging system and an operator’s platform. The machine can operate at working pressures up to an absolute pressure of 4 bar.

The FZ-20 is a multipurpose crystal grower designed so that its centre of gravity coincides with the melt zone and an efficient support system provides self-alignment and protection against external vibrations. The main chamber is equipped with a number of ports for special applications and equipment.

References

The FZ-20 has been supplied to Topsoe customers in USA, China and Russia.

Features:	Oil free sealing system (no contamination of crystals) Operator’s hydraulic platform Data logging system for automatic operation Automatic diameter measuring device Movable coil with high accuracy positioning Horizontally movable upper spindle Graphite pre-heating system Remote position control of reflector