Resist Ashing System GIGAbatch 360 P / 380 P
High-volume asher for advanced waferfabs, motorized door, ready for combination with a wafer transfer unit for sage and gentle automatic wafer loading. Of up to 50 wafers simultaneously, resulting in a throughput of more than 100 wafers/h for post-implant strip.
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Technical Specifications
Business unit
Your service contact
PVA TePla AG D-85551 Kirchheim Phone: +49 (0) 89/905 03-0 E-mail: mailto:service.plasma@pvatepla.com
Downloads / Information Material
You can refer information material at our Download-Service , or address an inquiry at our Contact Form.
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- 02/23/12
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Annual Report 2011