Facts and Figures
| in EUR`000 | 2009 | 2008 | 2007 |
| Sales Revenues | 134,688 | 168,591 | 113,704 |
| - Industrial Systems | 38,922 | 45,994 | 36,946 |
| - Semiconductor Systems | 38,851 | 105,774 | 60,053 |
| - Solar Systems | 56,916 | 16,822 | 16,705 |
| Gross profit | 38,861 | 37,735 | 27,271 |
| In % of sales revenues | 28.9 | 22.4 | 24.0 |
| R&D expenses | 2,449 | 1,790 | 1,719 |
| Operating result (EBIT) | 16,615 | 15,043 | 9,977 |
| In % of sales revenues | 12.3 | 8.9 | 8.8 |
| Consolidated Net income/loss | 10,690 | 9,735 | 6,052 |
| In % of sales revenues | 7.9 | 5.8 | 5.3 |
| Earnings per share (EPS), in EUR * | 0.50 | 0.46 | 0.28 |
| Capital expenditures | 2,748 | 11,761 | 18,934 |
| Total assets | 127,995 | 122,081 | 108,788 |
| Equity ratio | 39.9 | 33.1 | 28.4 |
| Employees as of 31.12. | 501 | 504 | 422 |
| Incoming orders | 68,953 | 189,940 | 145,968 |
| Order backlog | 87,768 | 151,794 | 137,118 |
| Book to bill Ratio | 0.51 | 1.13 | 1.28 |
| Cash Flow from operating activities | 29,588 | 8,699 | 6,759 |
* Average number of shares outstandings: 21,749,988
| in EUR`000 | QI 2010 | QI 2009 | QI 2008 |
| Sales Revenues | 33,032 | 38,634 | 34,588 |
| - Industrial Systems | 6,813 | 10,854 | 10,058 |
| - Semiconductor Systems | 3,370 | 10,858 | 21,134 |
| - Solar Systems | 22,848 | 16,922 | 3,396 |
| Gross profit | 8,156 | 11,152 | 7,312 |
| In % of sales revenues | 24.7 | 28.9 | 21.1 |
| R&D expenses | 557 | 628 | 346 |
| Operating result (EBIT) | 3,201 | 4,716 | 2,150 |
| In % of sales revenues | 9.7 | 12.2 | 6.2 |
| Consolidated Net income | 1,975 | 2,905 | 1,586 |
| In % of sales revenues | 6.0 | 7.5 | 4.6 |
| Earnings per share (EPS), in EUR * | 0.09 | 0.13 | 0.07 |
| Capital expenditures | 206 | 1,285 | 4,224 |
| Total assets | 137,864 | 127,995** | 122,081** |
| Equity ratio | 38.5 | 39.9** | 33.1** |
| Employees | 507 | 511 | 452 |
| Incoming orders | 18,694 | 16,292 | 33,116 |
| Order backlog | 71,118 | 129,785 | 135,571 |
| Book to bill Ratio | 0.57 | 0.42 | 0.96 |
| Cash Flow from operating activities | -570 | 4,490 | -5,798 |
* Average number of shares outstandings: 21,449,998
** as of the reporting date December 31
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