Division Plasma Systems
Originating from the former TePla AG Munich, the division Plasma Systems designs, develops and builds customer specific plasma equipment. The division specializes in technologies used for the surface modification of substrates through the controlled application of plasma. Thereby we are able to provide to our customers specific solutions in the following two application areas:
| Semiconductor Market |
Industrial / Medical Market |
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| Power Semiconductors & Masks | Optical Disc Mastering | Surface Nitriding |
| MEMS | Elastomers: Surface Tack & Bonding | Sterilization |
| Compound Semiconductors | Elektronics: Potting & Encapsulation | Plasma-Polymerization |
| Displays (OLED, PLED) | Culture Media | |
| Solar Cells | ||
| Ultra Thin Wafers | ||
| Chip Packaging | ||
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