The Polysilicon Test Grower - FZ-14M


Description

For analytical purposes, the FZ-14M has been developed. This is a floatzone silicon crystal grower specifically designed in accordance with the requirements of ASTM Std. F1723-96. The FZ-14M converts miniature rods of polycrystalline silicon into monocrystalline silicon for use in the assessment of the quality and purity of polycrystalline material. The F1723-96 prescribes that samples from the core of the polysilicone are converted into monocrystalline silicon in the floatzone grower. The rod is converted in a single pass in a gas ambient atmosphere (argon). The single crystal is analysed by spectrophotometric methods to determine the trace impurities in the polysilicon. The trace impurities are acceptor (boron and/or aluminum), donor (phosphorus and/or arcenic), and carbon.  


References

The FZ-14M has been supplied to some of the world’s largest polysilicon manufacturers.

 

 

Typ FZ 14M 
Features:
  • No oil (hydrocarbons) at any component
  • Ultra low (no) natural pollution
  • Ultimate component quality
  • Low weight (aluminum frame)
  • High vacuum turbo pump systems
  • Electro-pneumatically operated
  • Remote controlled door clamping system

 

Main Components
The complete FZ-14M crystal grower consists of the following components:
  • Floatzone refiner
  • High frequency generator
  • High vacuum turbo pump system
  • Control panel
  • Electro-pneumatically operated pre-heating system

  

  

  

  


 

Anwendungsmöglichkeiten

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Geschäftsbereiche

gb Semiconductor Systems



 

trenner

 

Ihr Ansprechpartner bei weiteren Fragen

 

PVA TePla AG
Im Westpark 10-12

35435 Wettenberg

+49 (0) 641/68690-0
E-Mail: info@pvatepla.com

 

trenner

 

 

Downloads / Infomaterial

 

FZ 14M - Produktdatenblatt (englisch)

 

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