The Floatzone Silicon Grower - FZ-30

In 2000 we presented the ultimate in the floatzone crystal growing field: The FZ-30 floatzone silicon grower with 8 inch crystal diameter and 2000 mm to the largest dimensions avaible today.

Applications

The FZ-30 is designed with the capacity to grow large monocrystalline silicon ingots at large diameters and utilizing the costly polysilicon input material to the highest extent possible.

Description

The FZ-30 consists of a main, upper and lower chamber and an upper and lower pulling arrangement, all built as modules. The FZ-30 is fully equipped with access doors, a tank circuit, a control panel, a high frequency generator, a data logging system and an operator’s platform. The machine can operate at working pressures up to 4 bar absolute pressure.

The FZ-30 is a very large crystal grower, designed so that its centre of gravity coincides with the melt zone. An efficient support system provides self-alignment and protection against external vibrations. The main chamber is equipped with a number of ports for special applications and equipment.

Features:	* Oil free sealing system * Operator’s hydraulic platform * Data logging system for automatic operation mode * Automatic diameter measuring device * Movable coil with high accuracy positioning * Horizontally movable upper spindle * Graphite pre-heating system * Remote position control of reflector
References:	This machine has been proving successfully in industrial production since the beginning of 2001.