Microwave Plasma System 4011

PS 4011
(manual and automatic robot loading version)

The plasma system 4011 is designed for process development of flat panel displays. The chamber is loaded manually. The glass plates are easily placed in a flat position on the extractable drawer. Depending on the gas selected, the plasma has various chemical effects on the surface to be treated. The efficient microwave plasma source has no electrodes, ensuring fast and uniform processing of large substrates.

The PS4011 version for small volume and pilot line production is also available with gate valve and lift pins for automatic loading by a loading robot.

Technische Spezifikationen

Plasma Kammer:	Aluminum W x H x D = 720 x 140 x 620 mm
Plasma Generation:	MW Frequency 2.45 GHz, max. 4,000 Watt variable power
System Dimension:	W x H x D = approx. 1,750 x 1,700 x 950 mm
Weight:	750 kg
Options:	Waste Gas Cleaning System Additional Gas Channel
Related Applications:	Pixel Activation Flat Panel Photoresist Ashing Bond Finger Cleaning