Microwave Gas Plasma System 210

Technische Spezifikationen

* Controller: Windows® O/S based touch screen interface offering fully automatic control.

* Multi-step recipes, real time graphic display, multi-level password access, data logging, and real time SPC monitoring of all plasma parameters is provided.

* Chamber: Quartz. Optional throttle valve available.

* Microwave Power .

* Display: Color 10.4 inch touch screen for control and monitoring of process parameters, automatic recipes, or manual plasma treatments.

* Two user specified gases, with 500 sccm MFCs standard, Optional 3rd gas channel available.

* Power Requirements: 120- 240 volts, 1ø, 50/60 Hz 30 amps maximum, changeable in the field.

* CE Certified


Safety and Security

* Electronic and software interlocks

      · Microwave Power
      · Pressure
      · Chamber door open/close

* Emergency OFF front and rear of reactor center and on wall box.

* Password security for manual and edit modes.

* Audible alarms.

* Software alarm limits on critical process parameters.

* Over-temperature alarm sensor (generator).
 

* Hard-wired interlocked with process chamber door.

* External interlock connection to extend 24 VAC control loop.

Anwendungsmöglichkeiten

Geschäftsbereiche

Semiconductor Systems

Ihr Ansprechpartner bei weiteren Fragen

PVA TePla AG
Plasma Systems
Ammerthalstr. 34

D-85551 Kirchheim

+49 (0) 89/905 03-0

E-mail: service.plasma@pvatepla.com

Nach Oben