EKZ 3000

Compared to the crystal pulling equipment used until now, the concept and design of the 300mm plant signify an important step in the technological development. In developing the plant, consideration was given to all knowledge gained to date and to the available know-how of our customers worldwide. These furnaces provide ideal conditions for meeting crystal quality requirements.

The batch weight in these 300mm (12") furnaces ranges up to 450kg of polysilicon, resulting in crystal lengths of almost 2.2m.

 

 

 

 

Typ EKZ 3000

Typ EKZ 3000

Shaft/Cable puller for the production of crystals with a diameter of up to 300mm (12")

 
Technical specifications

Crucible diameter:
915mm (36")

Batch fill:

450kg

 

Crystal lift:
4,000mm

Vessel diameter:
1,320mm


Overall height:

13,040mm (with shaft)
9,680mm (with cable)

 

 

 


Applications

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Business units

Geschäftbereich Semiconductor Systems



 

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Your service contact
Service Contact

 

 

PVA TePla AG
Im Westpark 10 - 12
35435 Wettenberg

+49 (0) 641/68690-0
E-Mail: info@pvatepla.com

 

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Downloads / Information Material

 

You can receive information material at our Download-Service , or make an inquiry using our Contact Form.

 


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