Microwave Plasma System GIGA 690 Solar

The Microwave Plasma System GIGA 690 Solar is a dedicated and reliable plasma system widely used in solar cell manufacturing for edge isolation. The system features unique microwave source technology for high etch rates. The telescopic stage option allows for easy loading of the wafer stack. A loading bench assists wafer stacking and application of the cell clamp.

Technical Specifications

Plasma Chamber:	Aluminum W x H x D = 400 x 400 x 400 mm
Plasma Generation:	Microwave Frequency 2.45 GHz Max. 1.000 Watt Variable power
System Dimension:	W x H x D = approx. 1.050 x 1.750 x 800 mm Weight: 169 kg
Options:	Vacuum Pump System Additional gas channels 3-4 Aluminum rotary platform, 350 mm Ø Easy loading accessory Cell stack holder with stacking accessory
Related Applications:	Solar Cell Etching, Edge isolation