Microwave Plasma System GIGA 690 Solar

The Microwave Plasma System GIGA 690 Solar is a dedicated and reliable plasma system widely used in solar cell manufacturing for edge isolation. The system features unique microwave source technology for high etch rates. The telescopic stage option allows for easy loading of the wafer stack. A loading bench assists wafer stacking and application of the cell clamp.


 

 

 

 

 

 

 

 

 
Technical Specifications

Plasma Chamber:


Aluminum
W x H x D = 400 x 400 x 400 mm

 

Plasma Generation:


Microwave Frequency 2.45 GHz
Max. 1.000 Watt
Variable power

 

System Dimension:


W x H x D = approx. 1.050 x 1.750 x 800 mm

Weight: 169 kg

Options:

Vacuum Pump System
Additional gas channels 3-4
Aluminum rotary platform, 350 mm Ø
Easy loading accessory
Cell stack holder with stacking accessory

 

Related Applications:

Solar Cell Etching, Edge isolation

 


 

 

 

Business unit

gb Semiconductor Systems


 

trenner

 

Your contact

 

PVA TePla AG
Plasma Systems

Hans-Riedl-Strasse 5
D-85622 Feldkirchen

Phone: +49 (0) 89/905 03-0

E-mail: plasma@pvatepla.com

 

trenner

 

 

Downloads / Information Material

 

You can refer information material at our Download-Service , or address an inquiry at our Contact Form.

 


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