Technical Data
| Available chamber diameter (mm) | 600, 900, 1,200, 1,600, 2,500 |
| Max. temperature (°C) | 1,600 (option 2,200) |
| Heating zones | 3 to 4 |
| Base pressure (mbar) | 0.02 |
| Reactor type | Bottom loading |
| Turntable with adjustable speed (RPM) | 0.1 to 3 |
| Gas system and liquid source dosing | N₂, H₂, CH₄, MTCS, SiCl₄ |
| Gas abbatment | Wet scrubber |
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