Physical Vapor Transport

In the Physical Vapor Transport (PVT) process, for example for silicon carbide, the starting material in powder form is sublimated directly from the solid to the gaseous state in a closed crucible at high temperatures (over 2,000 °C). Due to the temperature gradient, the resulting vapor mixture rises towards a cooler seed. At this point, the vapor condenses and the SiC molecules deposit layer by layer, forming a high-quality monocrystalline boule. Depending on the desired target thickness of the boule, this process can take from several days to several weeks.

Argon and nitrogen are typically used as process gases to create an atmosphere optimal for the process. Alternatively, we also offer system variants in which hydrogen (H₂) is used as an active reactant. This is particularly necessary for the growth of transparent or semi-insulating crystals.

Precise control of temperature, pressure, and gas atmosphere is crucial for optimal control of crystal growth and ensures high material quality. High repeatability of these process conditions—from process to process and from system to system—is essential to achieve a high yield. In the hydrogen variant, hydrogen specifically prevents n-type doping by nitrogen, enabling the production of transparent or semi-insulating material.

Physical Vapor Transport (PVT) systems are indispensable for the production of high-quality semiconductor crystals. They are characterized by their ability to reliably generate and maintain temperatures above 2,000 °C in order to efficiently transfer starting materials into the gas phase. Precise control of process conditions enables the growth of monocrystalline boules with outstanding quality and yield.

Modern PVT systems meet the highest requirements for compactness, repeatability, and flexibility. They are suitable for mass production as well as for the development of customized solutions and offer advanced automation, including connectivity to standards such as OPC-UA and SECS/GEM for seamless integration into the production environment.

PVA TePla has been a leading supplier of PVT systems for over a decade and sets benchmarks in innovation and quality through continuous development and close collaboration with industrial and academic partners. Our customers benefit from customized solutions and a strong international presence.

For the production of standard and customer‑specific pressure vessels, components, and vacuum chambers, we operate our own manufacturing facility in Europe. It is entirely powered without the use of fossil fuels, fully aligning with our sustainability objectives.

Key advantages at a glance

• Fast delivery times: Greater independence from external suppliers
• Flexible customization: Short‑notice design changes can be implemented immediately.
• Reliable material availability: Constant access to high‑quality materials thanks to long‑standing local partnerships.
• Highest processing quality incl. standards: Performing welding operations in‑house allows direct monitoring of joint conformity, which is essential for meeting standards such as UNI EN ISO 3834.
• Top‑tier standards: Naturally, our facility meets our stringent requirements for quality, safety, and sustainability.