Special Features
For maximum user convenience, the system is optionally available with a mobile loading and unloading system, facilitating handling and ensuring efficient and safe operation. In addition, the highly precise temperature control and gradient management are noteworthy, with exact values tailored to the specific material system.
Kronos offers a powerful and reliable solution for crystal production using the VGF process—perfectly aligned with the requirements of modern semiconductor and materials technology.
| Crucible diameter | 4‘‘ – 6‘‘ |
| Crucible height | Up to 450 mm |
| Chamber diameter | 800 mm |
| Chamber height | 975 mm |
| Operating pressure | Max. 40 bar |
| Number of heaters | 4 |
| Material | Gallium Arsenide, Indium Phosphide |
| Height | approx. 3,800 mm (without optional temp. profiling unit) |
| Width | approx. 1,920 mm |
| Depth | approx. 3,000 mm |
| Weight | approx. 6,000 kg |
| Recommended ceiling height | min. 5,000 mm (for removal of top chamber lid) |
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