Plasma Batch Type Systems

• GIGA 690 

• GIGA 690 Inline

• GIGA 690 Autofab

The versatile GIGA 690 is a reliable batch backend tool. It is used as a common platform to cover different tasks, from a standalone single solution up to fully automated cluster system.

The substrates / products will be treated in a batch type product carrier.

GIGA 690, GIGA 690IL and GIGA 690 Autofab

BGAs, lead frames, PCBs and wafers

• Activation before molding, underfill, coating

• Cleaning before wire bond

• Pre flip chip underfill

• Pre solder ball attach

• Substrate & wafer cleaning / activation

• Up to 6 magazines batch processing

Others

• Substrate cleaning / activation of alternative products like sensors, medical components and other parts

GIGA 690 and GIGA 690 Inline

• Flexibility: broad spectrum of applications and possibilities

• GHz plasma, aluminium chamber, ceramic window

• No electrodes inside chamber

• 2 different chamber sizes (64 or 91 litres)

GIGA 690 AutoFab

• Fully automated cluster solution

• High throughput at small footprint through ingenious combination of batch treatment and single wafer automation

• Bullet proof plasma technology with best uniformity results