Plasma Batch Type Systems

• GIGA690 

• GIGA690 IL

• AUTOfab GIGA690 

The versatile GIGA690 is a reliable batch backend tool. It is used as a common platform to cover different tasks, from a standalone single solution up to a fully automated cluster system.

The substrates or products are treated in a batch-type product carrier.

GIGA690, GIGA690 IL and AUTOfab GIGA690 

BGAs, lead frames, PCBs and wafers

• Activation before molding, underfill, and coating

• Cleaning before wire bonding

• Pre-flip-chip underfill

• Pre-solder-ball attach

• Substrate & wafer cleaning / activation

• Batch processing of up to 6 magazines 

Others

• Substrate cleaning / activation of alternative products such as sensors, medical components and other parts

GIGA690 and GIGA690 IL

• Flexibility: a broad range of applications and options

• GHz plasma, aluminum chamber, ceramic window

• No electrodes inside the chamber

• Two chamber sizes (64 or 91 liters)

AUTOfab GIGA690 

• Fully automated cluster solution

• High throughput at small footprint through ingenious combination of batch treatment and single wafer automation

• Robust plasma technology with the best uniformity