Typical applications

IoN 100 plasma system

  • Surface cleaning
  • Surface activation
  • Surface functionalization
  • Deposition of siloxane and organic thin films
Next
A white PVA TePla plasma system cabinet with an open door revealing multiple internal metal shelves for semiconductor equipment processing.
Additional Features
Plug-and-play self-installation
Flexible electrodes
Industrial computer with LCD touch panel and keyboard
Windows-based operating system
Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and SEMI E95-1101
Multi-level user access
Software
Recipe editor for fast and versatile step controls
Onboard diagnostic features and alarm logging
Online, web-based simulation, training, and support

Interested in IoN 100?

Get in touch