Typical applications

IoN 10Q plasma system

  • Photoresist ashing and descum
  • Surface cleaning
  • Surface activation
Next
A PVA TePla plasma system unit featuring a touchscreen interface, control panel, and emergency stop button for industrial semiconductor equipment.
Additional Features
Small footprint, tabletop design
Plug-and-play self-installation
Industrial computer with LCD touch panel and keyboard
Windows based operating system
Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and SEMI E95-1101
Multi-level user access
Software
Recipe editor for fast and versatile step controls
Onboard diagnostic features and alarm logging
Remote process monitoring via Ethernet
Online, web-based simulation, training, and support

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