Typical applications

IoN 10Q plasma system

  • Photoresist ashing and descum
  • Surface cleaning
  • Surface activation
Next
Additional features
Small foot print table top design
Plug and play self installation
Industrial computer with LCD touch panel and keyboard. Windows based operating system
Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and Semi E95-1101
Multi-level user access
Software
Recipe editor for fast and versatile step controls
Onboard diagnostic features and alarm logging
Remote process monitoring via Ethernet
Online web based simulation/training/support

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