Technical Data (base trim)
| Charge weight max. [kg] | 300 |
| Usable dimensions max. (ØxH) [mm] | 600 x 900 |
| Max. process temperature [°C] | 2,400 |
| Temperature uniformity [K] | ±50 |
| Operating pressure range [mbar] | 0.01…950 |
| Charge weight max. [kg] | 2,000 |
| Usable dimensions max. (ØxH) [mm] | 1,220 x 1,400 |
| Max. process temperature [°C] | 1,600 |
| Temperature uniformity [K] | ±50 |
| Operating pressure range [mbar] | 0.01…950 |
| Charge weight max. [kg] | 2,000 |
| Usable dimensions max. (ØxH) [mm] | 1,420 x 1,500 |
| Max. process temperature [°C] | 2,400 |
| Temperature uniformity [K] | ±50 |
| Operating pressure range [mbar] | 0.01…950 |
| Charge weight max. [kg] | 3,000 |
| Usable dimensions max. (ØxH) [mm] | 1,800 x 2,000 |
| Max. process temperature [°C] | 2,400 |
| Temperature uniformity [K] | ±50 |
| Operating pressure range [mbar] | 0.01…950 |
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