Corporate

Full insight from your bench-top

VEpioneer series

  • Fully integrated, one-button bench-top Hyperspectral Vision system, ready to use out of the box
  • Non-destructive, full-surface (100%) inspection in a single run
  • Fast measurement in less than 10 seconds
  • Layer thickness detection from 1 nm to 500 µm, depending on layer material
  • Spatially resolved recognition of defects, contaminations, and surface properties
  • Compatible with a wide range of substrates: semiconductors, metals, polymers, ceramics, glass and more
  • Centralised control and evaluation via VEsolve® pro software

VEpioneer macro

  • Compact bench-top system designed for macroscopic inspection
  • Accommodates sample sizes up to 360 × 360 mm
  • Spatial resolution of 100 - 300 µm with high-resolution scan modes available
  • Tailored sample stage and versatile customization options

VEpioneer micro

  • Bench-top system optimised for microscopic inspection
  • Achieves sub-micron spatial resolution depending on microscope lens
  • Handles sample sizes up to 130 × 130 mm
  • Flexible operation: manual control via joystick or fully automatic via software

VEpioneer core

  • The world's smallest fully integrated Hyperspectral Vision bench-top system
  • Ultra-compact footprint of only 230 × 200 mm at just 12 kg
  • Designed for sample sizes up to 100 × 100 mm
  • Delivers spatial resolution of 100 µm, ideal as an entry point into hyperspectral inspection 

VEpioneer semi

  • Cleanroom-compatible version (ISO class 3) with integrated laminar flow FFU
  • Built for macroscopic wafer inspection, supporting 200 mm and 300 mm wafers
  • Equipped with 3-point wafer holder for safe, contamination-free handling
  • Spatial resolution from 300 µm with high-resolution scan modes available
Next
Sensor head inspecting a semiconductor wafer with colorful chip structures.
PVA TePla VEpioneer benchtop acoustic microscopy system.
The PVA TePla VEpioneer MICRO metrology system for semiconductor equipment, featuring a microscope head, stage, and control unit on a black base.

The PVA TePla VEpioneer MICRO is a specialized metrology system designed for precise inspection tasks within semiconductor equipment environments.

A white PVA TePla metrology system featuring an internal scanning sensor positioned above a wafer stage for precise semiconductor inspection.

A PVA TePla metrology unit designed for semiconductor equipment analysis, showing a scanning sensor positioned over a wafer stage.

A PVA TePla semiconductor equipment unit for metrology featuring a glass chamber with a wafer inside, isolated against a black background.

This PVA TePla system is designed for semiconductor metrology, featuring a glass chamber that houses a wafer for precise inspection.

Technical Data
Measurement modeReflectance
Measurement time< 10 s (typical)
Wavelength rangeVNIR: 400-1,000 nm | SWIR 1: 900 – 1,700 nm
Spectral resolutionVNIR: 1.34 nm | SWIR: 3.5 nm
Product Brochures

Interested in VEpioneer?

Get in touch

Contact Form
Corporate