VEpioneer series

• Fully integrated, one-button bench-top Hyperspectral Vision system, ready to use out of the box
• Non-destructive, full-surface (100%) inspection in a single run
• Fast measurement in less than 10 seconds
• Layer thickness detection from 1 nm to 500 µm, depending on layer material
• Spatially resolved recognition of defects, contaminations, and surface properties
• Compatible with a wide range of substrates: semiconductors, metals, polymers, ceramics, glass and more
• Centralised control and evaluation via VEsolve^® pro software

VEpioneer macro

• Compact bench-top system designed for macroscopic inspection
• Accommodates sample sizes up to 360 × 360 mm
• Spatial resolution of 100 - 300 µm with high-resolution scan modes available
• Tailored sample stage and versatile customization options

VEpioneer micro

• Bench-top system optimised for microscopic inspection
• Achieves sub-micron spatial resolution depending on microscope lens
• Handles sample sizes up to 130 × 130 mm
• Flexible operation: manual control via joystick or fully automatic via software

VEpioneer core

• The world's smallest fully integrated Hyperspectral Vision bench-top system
• Ultra-compact footprint of only 230 × 200 mm at just 12 kg
• Designed for sample sizes up to 100 × 100 mm
• Delivers spatial resolution of 100 µm, ideal as an entry point into hyperspectral inspection 

VEpioneer semi

• Cleanroom-compatible version (ISO class 3) with integrated laminar flow FFU
• Built for macroscopic wafer inspection, supporting 200 mm and 300 mm wafers
• Equipped with 3-point wafer holder for safe, contamination-free handling
• Spatial resolution from 300 µm with high-resolution scan modes available