LuXpector THEA

• Cost-Efficient Operation: Reduced total cost of ownership (TCO) through intelligent design, modular components, and low maintenance requirements.
• Serviceability Built In: Modular design, remote support, and low‑maintenance hardware ensure high uptime and easy servicing.
• User-Friendly Interface: Easy operation is ensured through an intuitive interface with automated calibration and analysis, even without ellipsometry experience.
• Flexible Integration: Ideal for R&D or integration into production lines, with support for SEMI automation and SECS/GEM.
• No Backside Reflection: (SiC) Accurate thin-film analysis on SiC wafers, eliminating errors from backside reflections for reliable results. 
• AlGaN Concentration: Accurate aluminum content determination in AlGaN layers through advanced band edge analysis.