SAM Auto Tray

Primary applications include the detection of voids, inclusions, and delaminations in bond interfaces, as well as identifying layer thickness variations in multilayer structures. Such defects may occur in different layers of the component. In mass production, high throughput is essential. Therefore, proprietary software supports simultaneous inspection of multiple layers. Additionally, multiple transducers, full tray scanning, and optimized tray handling are available.

SAM Auto Tray - Features

SAM Auto Tray is a customer-specific solution for inline process diagnostics and process control which can be integrated into any production environment thanks to the following features:

• Inline inspection for JEDEC trays
• Cleanroom compatibility up to class 10
• Integrated data analysis and automation
• Software and fab communication via SECS interface
• Degassing system for process water
• Automatic water change with conductivity monitoring