Features

SAM Auto Wafer

A user-friendly graphical interface of the Auto Wafer series ensures that the powerful functionality of wafer automation can be applied with ease. Developed according to semiconductor industry standards and built on a central platform utilizing state-of-the-art production technology, the wafer automation system can precisely handle 8-inch and 12-inch wafers and is compatible with cleanroom class ISO 5.

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View into a scanning acoustic microscope
Robotic gripper during automated wafer transfer in a PVA TePla system.
Technical Data
Supply voltage208 V 3/N/PE, 50 Hz
Total connected load3 kW
Rated current5 A
Main fusemax. 20 A, slow-blow


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