Technical Data
| Supply voltage | 208 V 3/N/PE, 50 Hz |
| Total connected load | 3 kW |
| Rated current | 5 A |
| Main fuse | max. 20 A, slow-blow |
Interested in SAM Auto Wafer?
Features
A user-friendly graphical interface of the Auto Wafer series ensures that the powerful functionality of wafer automation can be applied with ease. Developed according to semiconductor industry standards and built on a central platform utilizing state-of-the-art production technology, the wafer automation system can precisely handle 8-inch and 12-inch wafers and is compatible with cleanroom class ISO 5.
| Supply voltage | 208 V 3/N/PE, 50 Hz |
| Total connected load | 3 kW |
| Rated current | 5 A |
| Main fuse | max. 20 A, slow-blow |
Interested in SAM Auto Wafer?