Contactless Monocrystal Growth for Material Evaluation
FZ-14M/FZ-14MG
Small polycrystalline samples from the production process are inductively melted in an argon atmosphere and crystallized on a seed into a monocrystal. This is then analyzed using spectrometric methods. This allows the quality of the produced polysilicon to be determined and documented. Due to contactless melting – the high ultimate vacuum generated by a turbomolecular pump and the use of ultra-pure argon as the process atmosphere – contamination during the process is effectively prevented.
In the FZ-14MG version, silicon granulate can be placed below the coil and, using a seed crystal at the upper feed, monocrystals for material analysis can be pulled in a process with reversed pulling direction. For this purpose, the upper spindle can be moved in both X and Y directions.