VEgauge

• Fully customizable inline inspection system for macroscopic and microscopic surface inspection
• Spatial resolution from sub-µm up to the meter range, tailored to your specific process requirements
• Field of view, sample size, and system dimensions defined by your production setup
• Near real-time evaluation for fast process feedback
• Non-destructive, full-surface (100%) inspection of thin films, defects, contaminations, and surface roughness
• Layer analysis from 1 nm to 500 µm, configured for your material stack
• Substrate-specific calibration: semiconductors, metals, polymers, ceramics, glass and more
• Scalable for parallel production lines: deploy multiple systems simultaneously, each individually configured
• Seamless integration into existing production workflows
• Centralised data management and control via VEsolve^® pro software