SIRD

• A robot transfers the wafer from the carrier to the measurement stage. The carrier can be placed either by an operator or automatically via OHT.
• The tool auto-tunes itself for optimal measurement settings, independent of the material's doping grade.
• Data is recorded according to a predefined measurement protocol detailing the area of interest, resolution, and measurement mode.
• After measurement, the wafer is returned to the carrier, and automated analysis of the measured map begins.
• Numerical data, such as defect counts by type or intensity, and customizable reports are generated and, if desired, sent to the host via the standard SECS/GEM protocol.