LiquidPrep 800 with µSI is engineered for the demanding requirements of ICP-MS analysis in semiconductor manufacturing and ultra-pure chemical operations. By automating calibration, sample dilution, and sample introduction, it reduces manual intervention at every critical step — delivering the consistency and accuracy that high-purity environments require.

Benefits

• Catch contamination early
• Less manual work, more reliable results
• One system. Full workflow.
• Built for the cleanroom
• Detect trace-level shifts early
• Automated, operator-independent results
• From sample to data, no handoffs
• ISO Class 3, SEMI S2, front-only access

µSI is the sample introduction module positioned in the immediate vicinity of the ICP-MS to minimize the liquid transfer path between final preparation and measurement. This design helps reduce the risk of contamination after sample preparation is complete and supports sample introduction into the ICP-MS under cleaner transfer conditions. By limiting exposure during the final introduction step, µSI helps preserve sample integrity for ultratrace analysis.